| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique which allows for flexible change of the delivery width of process liquid in a slit nozzle.SOLUTION: A slit nozzle 42 includes a nozzle body 71, a pair of side plates 72 arranged on the side of both end faces of the nozzle body 71 in the longitudinal direction, and an adjustment thin plate 73 held between the nozzle body 71 and side plate 72. The adjustment thin plate 73 is provided while penetrating from the inside surface in contact with the end face of the nozzle body 71 to the outside surface in contact with the side plate 72, and has a liquid feed space V interconnected with a liquid feed path 712 at the opening end on the inside surface, with the opening end on the outside surface opening for the side plate 72, and a leakage structure L for making the process liquid in the liquid feed space V leak from the lower edge of the outside surface. |
