PATTERN POSITION DETECTION METHOD, PATTERN POSITION DETECTION SYSTEM, AND IMAGE QUALITY ADJUSTMENT TECHNIQUE USING PATTERN POSITION DETECTION METHOD AND PATTERN POSITION DETECTION SYSTEM

摘要

[Problem] To provide a pattern position detection method that enables the position of an alignment pattern to be detected in a highly-precise manner. [Solution] In this pattern position detection method, a pattern is displayed on a liquid crystal panel (2) and captured by a camera (3), and a black image is displayed on the liquid crystal panel (2) and is captured by the camera (3) at the same shutter speed or F-value used when the pattern was captured; and the position of an image of the pattern on the imaging area of the camera (3) is detected on the basis of the differences between the captured image of the pattern and the captured image of the black image.