发明名称 |
METHOD FOR PRODUCING GRAPHENE, GRAPHENE PRODUCED ON SUBSTRATE, AND GRAPHENE ON SUBSTRATE |
摘要 |
A production method for producing graphene on a substrate, and the like are provided. According to the method, in a forming step heating is conducted to a solid solution temperature at which a solid solution of carbon dissolved in a metal is able to be formed, and a solid solution layer (505) composed of the solid solution on a substrate (103) is formed; and in a removing step graphene (102) is grown on the substrate (103) by removing the metal from the solid solution layer (505) while maintaining the heating to the solid solution temperature. As a solvent for dissolving carbon a metal composed of a single element as well as various alloys are applicable. The graphene (102) touches directly the substrate (103), by removing the metal from the solid solution layer (505) by supplying an etching gas. |
申请公布号 |
EP2682366(A4) |
申请公布日期 |
2014.08.27 |
申请号 |
EP20120752296 |
申请日期 |
2012.02.27 |
申请人 |
JAPAN SCIENCE AND TECHNOLOGY AGENCY |
发明人 |
NODA, SUGURU;TAKANO, SOICHIRO |
分类号 |
H01L29/786;C01B31/04 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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