发明名称 |
METHOD OF DETERMINING INTERNAL QUANTUM EFFICIENCY OF SEMICONDUCTOR PHOTODIODE BASED ON CURRENT-VOLTAGE CHARACTERISTICS THEREOF |
摘要 |
FIELD: physics.SUBSTANCE: invention is intended for metrological determination of the internal quantum efficiency of a semiconductor photodiode based on the current-voltage characteristic thereof. The oxide biasing method is the known method of calibrating photodiodes. The efficiency of collecting charges for photocurrent generated in a p+ region needs to be determined in order to describe silicon p+nn+photodiodes. The primary reason for losses in the frontal region is the high rate of electron-hole recombination. This effect is intensified by the presence of positively charged ions which result in a surface electric field. The oxide biasing method is widely used to determine the extent of this effect on the internal quantum efficiency of a diode. The advantage of this method is direct measurement of saturation photocurrent and calculating internal quantum efficiency therefrom. However, this method has a shortcoming which lies in the degradation of the working surface of the semiconductor under the effect of a high negative voltage applied to the surface. The aim of this invention is to provide a method of determining quantum efficiency of a photodiode, which is based on comparing experimentally measured current-voltage characteristics thereof with theoretically calculated characteristics. This aim is achieved by recording to current-voltage characteristics of a photodiode at two different power values of incident laser radiation for which only the ratio is known. Said characteristics are then compared using a developed calculation procedure.EFFECT: simple calibration procedure while maintaining accuracy characteristics of the photodiode. |
申请公布号 |
RU2527312(C1) |
申请公布日期 |
2014.08.27 |
申请号 |
RU20130111921 |
申请日期 |
2013.03.18 |
申请人 |
FEDERAL'NOE GOSUDARSTVENNOE UNITARNOE PREDPRIJATIE "VSEROSSIJSKIJ NAUCHNO-ISSLEDOVATEL'SKIJ INSTITUT OPTIKO-FIZICHESKIKH IZMERENIJ" (FGUP "VNIIOFI") |
发明人 |
KOVALEV ALEKSANDR ALEKSEEVICH;LIBERMAN ANATOLIJ ABRAMOVICH;MOSKALJUK SERGEJ ALEKSANDROVICH;MIKRJUKOV ALEKSEJ SERGEEVICH |
分类号 |
H01L31/00 |
主分类号 |
H01L31/00 |
代理机构 |
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代理人 |
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