| 摘要 |
PROBLEM TO BE SOLVED: To provide a chuck device with a measuring function, which appropriately stores a compact and lightweight measuring mechanism, can improve a measuring accuracy, and can be inexpensively manufactured, and a robot chuck device. SOLUTION: The chuck device with the measuring function includes a sensor 10 in which the other electrode 12 is slidably disposed while keeping a predetermined interval with respect to one electrode 11, a capacity detection element 40 for detecting a capacitance of both electrodes 11, 12, a measuring information output circuit 50 for outputting the measuring information about the displacement of the other electrode 12 with respect to the one electrode 11 based on a signal obtained by the capacity detection element 40, a chuck base 20 having a stopper 22 which has the one electrode 11 to be fixed and is abutted to one side of a workpiece to be held simultaneously with measurement, and a movable claw 30 for the chuck, which has the other electrode 12 mounted thereon and is integrally provided on the stopper 22 so as to be separated therefrom or brought into contact therewith, and abutted to the other side of the workpiece. COPYRIGHT: (C)2011,JPO&INPIT |
