TEMPERATURE SYSTEM HAVING AN IMPURITY FILTER

摘要

A temperature control system for controlling a temperature of a device under test includes a fluid source and a cooling device reducing a temperature of the fluid supplied by the fluid source and outputting the fluid having the reduced temperature to a device under test. A filter is positioned between the device under test and the cooling device to filter out ice particles that lead to significant charge generation in order to prevent the device under test from being subjected to high voltages as a result of static charge generation.