| 摘要 |
According to the present invention, disclosed is a linear evaporation source comprising an evaporation source (110) consisting of a material having a micropore for accommodating a deposition material (111) and diffusing the deposition material (111) evaporated inside to the outside; a guide pipe (120) arranged in the form of surrounding the outside of the evaporation source (110), having a space part (121) for guiding and transferring the deposition material (111) diffused from the evaporation source (110), and whose one side is opened to discharge the transferred deposited material (111); a linear hot rib part (130) whose both sides are opened and having a path (131) inside, allowing the deposited material (111) discharged from the guide pipe (120) to flow in the path (131) since the opened one side is combined with one side of the guide pipe (120), and having a nozzle part (135) for spraying a flowed deposited material (111) to the surface of a substrate (10) as the opened other side is arranged toward the substrate (10); and a heating part (140) arranged in one side of the guide pipe (120) to heat the evaporation source (110). |
