Optical member with plate-crystal film, method for producing same, and optical system

摘要

An optical member includes a ray effective area, a ray ineffective area, at least one continuous protective film arranged over the ray effective area and at least part of the ray ineffective area, a light-shielding film arranged on the protective film located in the ray ineffective area, and a plate-crystal film arranged on the protective film located in the ray effective area, the plate-crystal film including mainly aluminum oxide and having a textured structure on a surface thereof, and an optical system includes the optical member.

主权项

1. A method for producing an optical member including a ray effective area and a ray ineffective area, the method comprising the steps of:
forming at least one continuous protective film over the ray effective area and at least part of the ray ineffective area; forming a light-shielding film on the protective film located in the ray ineffective area; after forming the light-shielding film, forming an aluminum-containing film on the protective film located in the ray effective area; and bringing the aluminum-containing film into contact with hot water to form a plate-crystal film on the protective film located in the ray effective area, the plate-crystal film having a textured structure on a surface thereof and comprising mainly aluminum oxide.