Optical device and exposure apparatus including the same

摘要

An optical device for splitting a single beam to a plurality of beams and an exposure apparatus including the optical device are disclosed. The optical device includes a first DOE lens array including a plurality of first diffractive optical element (DOE) lenses that are two-dimensionally arranged on a first plane and a second lens array including a plurality of second DOE lenses arranged on a second plane parallel to the first plane so as to respectively correspond to the plurality of first DOE lenses. The first DOE lens array splits a first parallel beam into a plurality of second beams by condensing the first parallel beam and the second DOE lens array modifies the plurality of second beams into a plurality of third beams.

主权项

1. An optical device, comprising:
a first lens array including a plurality of first diffractive optical element (DOE) lenses two-dimensionally arranged on a first plane, the first lens array being configured to split a first parallel beam into a plurality of second beams by condensing the first parallel beam; a second lens array including a plurality of second DOE lenses arranged on a second plane parallel to the first plane so as to respectively correspond to the plurality of first DOE lenses, the second lens array being configured to modify the plurality of second beams into a plurality of third beams; and an adjustable spacer between the first and second lens arrays.