| 摘要 |
The present invention provides a processing apparatus and a processing method, which can perform appropriate processing on condition that processing liquid for recycling is used for processing. According to one embodiment, the processing apparatus is provided with the following components: a conveying part which conveys processed object, a recycling part which recycles first processing liquid that is supplied to the processing surface of the processed object conveyed by the conveying part, a first nozzle which ejects the first processing liquid that is recycled by the recycling part to the processing surface of the processed object, a second nozzle which is arranged at the downstream side in the conveying direction of the first nozzle and ejects second processing liquid to the processing surface of the processed object, and a third nozzle which is arranged at the downstream side in the conveying direction of the second nozzle and ejects cleaning liquid to the processing surface of the processed object. Furthermore, the second nozzle ejects the second processing liquid in a direction at the downstream side of the conveying direction compared with the direction that is vertical to the conveying direction, and the third nozzle ejects the cleaning liquid in a direction at the upstream side of the conveying direction compared with the direction that is vertical to the conveying direction. |
