COMPOSITE MATERIAL WAFER AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a composite material wafer and a manufacturing method thereof.SOLUTION: A composite material wafer 10 comprises a substrate 11 and an SiC-based functional layer 18. The substrate includes a porous carbon substrate core and an encapsulation layer 14 for encapsulating the substrate core 12. The Sic-based functional layer contains at least one of a carbide and a silicide produced by reaction between a part of the SiC-based functional layer and carbide and silicide production metals in an interface region with the encapsulation layer. The quantity of the carbide and silicide production metals summed up over thickness of the functional layer is 10mg/cmto 0.1 mg/cm.