CONDUCTIVE OXIDE AND SEMICONDUCTOR OXIDE FILM

摘要

PROBLEM TO BE SOLVED: To provide a conductive oxide which has a lower rare metal content, and can suppress a reduction in a forming speed of a semiconductor oxide film, and to provide a semiconductor oxide film formed using the conductive oxide.SOLUTION: A conductive oxide is a conductive oxide having a crystal phase formed from a basic structure which is the same crystal structure as that of InAlZnO. The conductive oxide is formed from a complex oxide of indium, aluminum and bivalent metal. An atomic concentration ratio of the aluminum to the indium in the crystal phase is larger than 1 and 1.2 or less. An atomic concentration ratio of the bivalent metal to the indium in the crystal phase is larger than 1 and 1.2 or less.