| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing device by which it is possible to check what external force is applied on the device during transportation.SOLUTION: A processing device includes a chuck table for holding a workpiece, and processing means which processes the workpiece held on the chuck table, and further includes an acceleration sensor which detects external force applied on the device itself, and recording means which records external force information detected by the acceleration sensor. The external force information is recorded in the recording means together with time information to record when and how the external force is applied on the processing device. |
