| 摘要 |
PROBLEM TO BE SOLVED: To facilitate changing the active buckling length of probes while keeping manufacturing costs low.SOLUTION: A probe unit includes plural probes 11a, a support part for supporting the probes 11a, and an electrode plate disposed on the support part. The support part includes support plates 41, 42 for supporting tip portions of the probes 11a inserted into support holes 51, 52, and support plates 43, 44 for supporting base end portions of the probes 11a inserted into support holes 53, 54. The support part can change its attitude into a first attitude in which the support plates 41-44 are laminated on one another so that opening surfaces of the support holes 51-54 are aligned in a vertical direction perpendicular to the support plates 41-44 and into a second attitude in which the support plate 42 and the support plate 43 are separated from each other with the support plates 43, 44 brought into contact with each other. In the second attitude, a distance D2 between the support plate 42 and the support plate 43 is changeable with a distance D1 between the inner surface of the support plate 42 and the outer surface of the support plate 44 maintained constant. |
