发明名称 PERIODIC LATTICE, METHOD FOR MANUFACTURING PERIODIC LATTICE AND MEASUREMENT DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a valid periodic lattice in terms of simplicity in the manufacturing of the periodic lattice.SOLUTION: A periodic lattice 1 contains: first materials; second materials and third materials whose transmittance or reflectance are different from each other. The periodic lattice 1 includes: a first layer 3 constituted of the first materials; and a second layer 4 laminated on the first layer 3, and constituted of second materials. A first lattice part 4a packed with third materials and a second lattice part 4b forming a space with the surface of the first layer 3 as a bottom face are formed in the second layer 4, and the second lattice part 4b is configured such that any portion other than the surface of the second layer 4 is opened to the outside of the periodic lattice 1.
申请公布号 JP2014153372(A) 申请公布日期 2014.08.25
申请号 JP20130019949 申请日期 2013.02.04
申请人 CANON INC 发明人 NAGAOKA TAKESHI
分类号 G02B5/18;G01D5/347 主分类号 G02B5/18
代理机构 代理人
主权项
地址