发明名称 NANOSTRUCTURE, OPTICAL DEVICE INCLUDING NANOSTRUCTURE AND METHODS OF MANUFACTURING THE SAME
摘要 The present invention relates to a nanostructure, an optical device including the same, and manufacturing methods thereof. The disclosed manufacturing method for the nanostructure can comprise: a step of forming a block copolymer template layer and a precursor pattern of metal combined to the same on a graphene layer; and a step of forming a nanopattern of metal reduced from the precursor pattern on the graphene layer by removing the block copolymer template layer and reducing the precursor pattern. The block copolymer template layer can be formed in order to directly contact the graphene layer. A step of transforming the shape of the block copolymer template layer can be additionally performed. A multi-component metal nanopattern array can be additionally formed using a multi-component block copolymer and a multi-component metal precursor.
申请公布号 KR20140102566(A) 申请公布日期 2014.08.22
申请号 KR20130016058 申请日期 2013.02.14
申请人 SAMSUNG ELECTRONICS CO., LTD.;UNIST ACADEMY-INDUSTRY RESEARCH CORPORATION 发明人 KIM, UN JEONG;KIM, JIN EUN;ROH, YOUNG GEUN;PARK, SOO JIN;PARK, YEON SANG;YOO, SEUNG MIN;LEE, CHANG WON;LEE, JAE SOONG;CHEON, SANG MO
分类号 B82B3/00;G01J1/00;H01L31/10 主分类号 B82B3/00
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