发明名称 WORK MEASURING APPARATUS AND WORK MEASURING METHOD
摘要 The task of the present invention is to easily and certainly check a measurement precision of a measuring unit. To resolve the task, a work measuring device (1) comprises a transfer table (3) having a work receiving hole (4) for transferring a work (W1); a separating supply unit (6); a first measuring unit (7a) for measuring the work (W1); a second measuring unit (7b); a third measuring unit (7c); and discharge units (8, 9) which discharge the work (W1). A control unit (12) adopts an ordinary measuring mode and measures the work (W1) which is supplied from the separating supply unit (6) to the work receiving hole (4) of the transfer table (3) by the measuring units (7a, 7b, 7c) and discharges the work (W1) from the discharge units (8, 9). The control unit (12) adopts a sample measuring unit. The control unit (12) measures a work (W1s) supplied from a sample table (10x) to the work receiving unit (4) of the transfer table (3) by the measuring units (7a, 7b, 7c) and returns the work (W1s) to the sample table (10x).
申请公布号 KR20140102595(A) 申请公布日期 2014.08.22
申请号 KR20130152061 申请日期 2013.12.09
申请人 TOKYO WELD CO., LTD. 发明人 YOSHIZAWA SEIJI;KOJIMA TOMOYUKI;ABE HIROAKI
分类号 H01L21/66 主分类号 H01L21/66
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