发明名称 |
DISPOSITIF POUR GENERER UN PLASMA PRESENTANT UNE ETENDUE IMPORTANTE LE LONG D'UN AXE PAR RESONNANCE CYCLOTRONIQUE ELECTRONIQUE RCE A PARTIR D'UN MILIEU GAZEUX |
摘要 |
The device includes at least two coaxial waveguides each formed of a central conductor and of an external conductor to bring microwaves into a treatment chamber. The at least two electromagnetic wave injection guides are combined with a magnetic circuit elongated in one direction. The magnetic circuit surrounding the waveguides by creating a magnetic field capable of achieving an ECR condition close to the waveguides. |
申请公布号 |
FR2995493(B1) |
申请公布日期 |
2014.08.22 |
申请号 |
FR20120058495 |
申请日期 |
2012.09.11 |
申请人 |
H.E.F. |
发明人 |
SCHMIDT BEAT;HEAU CHRISTOPHE CHARLES JEAN;MAURIN PERRIER PHILIPPE GEORGES CHARLES |
分类号 |
H05H1/46 |
主分类号 |
H05H1/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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