PIEZOELECTRIC ARRAY EMPLOYING INTEGRATED MEMS SWITCHES

摘要

Switchable micromachined transducer arrays are described where a MicroElectroMechanical Systems (MEMS) switch, or relay, is monolithically integrated with a transducer element. In embodiments, the MEMS switch is implemented in the same substrate as the transducer array to implement one or more logic, addressing, or transducer control function. In embodiments, each transducer element of an array is a piezoelectric element coupled to at least one MEMS switch to provide element-level addressing within the array. In certain embodiments the same piezoelectric material employed in the transducer is utilized in the MEMS switch.

主权项

1. A piezoelectric micromachined transducer (pMUT) array, comprising:
a transducer substrate; a plurality of piezoelectric transducers disposed over a first area of the transducer substrate; and a plurality of MEMS switches coupled to the plurality of transducers, wherein states of the MEMS switches control access to individual transducers of the plurality.