发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device capable of suppressing increase in manufacturing costs, improving connection reliability of a metal layer directly bonded on one face of a SiC substrate and further ensuring ohmic contact of the metal layer with respect to the SiC substrate, and a method for manufacturing the semiconductor device.SOLUTION: In a semiconductor device 1 including an SiC substrate 2, a high carbon concentration SiC layer 3 containing more highly concentrated carbon than that of a surface layer portion on a side of a front surface 21 is formed on a surface layer portion on a side of a rear surface 22 of the SiC substrate 2. A drain electrode 17 is directly bonded to a surface of the high carbon concentration SiC layer 3.
申请公布号 JP2014150278(A) 申请公布日期 2014.08.21
申请号 JP20140083139 申请日期 2014.04.14
申请人 ROHM CO LTD 发明人 NAKANO YUUKI
分类号 H01L29/78;H01L21/28;H01L21/336;H01L29/06;H01L29/12;H01L29/47;H01L29/872 主分类号 H01L29/78
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