| 摘要 |
<p>This acceleration sensor (21) comprises weights (231; 232), a supporting part (22), and beams (241A-241C; 242A-242C) provided with piezoresistive elements, wherein: each weight (231; 232) has a protruding part (231A; 232B) and recessed parts (231B, 231C; 232B, 232C); the supporting part (22) has protruding parts (221B, 221C, 222B, 222C) and recessed parts (221A, 222A); the beams (241A; 242A) are connected to the protruding parts (231A; 232A) and the recessed parts (221A; 222A); the beams (241B; 242B) are connected to the recessed parts (231B; 232B) and the protruding parts (221B; 222B); and the beams (241C; 242C) are connected to the recessed parts (231C; 232C) and the protruding parts (221C; 222C).</p> |
