发明名称 VAPOR DEPOSITION MASK MANUFACTURING METHOD AND VAPOR DEPOSITION MASK
摘要 PROBLEM TO BE SOLVED: To provide a vapor deposition mask in which a vapor deposition material can be deposited at high utilization efficiency.SOLUTION: A vapor deposition mask 20 includes an effective region 22 in which plural through holes 25 are formed, and a peripheral region 23 positioned around the effective region. In the effective region, plural recess parts 30 whose width gets larger toward one side are provided on one side in a normal direction of the deposition mask, and the recess parts 30 define a through hole 25. A wall surface 31 of at least one recess part is merged, at its whole circumference, with a wall surface of any other recess part positioned around the recess part.
申请公布号 JP2014148745(A) 申请公布日期 2014.08.21
申请号 JP20130185713 申请日期 2013.09.06
申请人 DAINIPPON PRINTING CO LTD 发明人 IKENAGA CHIKAO
分类号 C23C14/04;H01L51/50;H05B33/10 主分类号 C23C14/04
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