| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical measuring device achieving reduction in space and costs.SOLUTION: Light from a measuring lamp 61 with which a measuring instrument 22 is provided is transmitted by a half mirror 63 to a coaxial epi-illumination telecentric lens 71, and the coaxial epi-illumination telecentric lens 71 emits the light as parallel light 72 to an object 2. The parallel light 72 reaches a mirror 12 while a part of the parallel light 72 is blocked by the object 2, which provides a shadow of the object 2 on the mirror 12. Light reflected by the mirror 12 passes through the coaxial epi-illumination telecentric lens 71, the half mirror 63, an imaging lens 65, and then an image of the light is taken by the camera 42. A control section 81 analyzes the image. Measuring external diameter dimensions, etc. of various parts of the object 2 on the basis of a shadow image 101 of the object 2 achieves inspection. |
