发明名称 METAL MASK HAVING A RESIN PLATE, VAPOR DEPOSITION MASK, METHOD FOR PRODUCING VAPOR DEPOSITION MASK DEVICE, AND METHOD FOR PRODUCING ORGANIC SEMICONDUCTOR ELEMENT
摘要 A method for producing a vapor deposition mask capable of satisfying both enhancement in definition and reduction in weight even when a size is increased, a method for producing a vapor deposition mask device capable of aligning the vapor deposition mask to a frame with high precision, and a method for producing an organic semiconductor element capable of producing an organic semiconductor element with high definition are provided. A metal mask provided with a slit, and a resin mask that is positioned on a front surface of the metal mask and has openings corresponding to a pattern to be produced by vapor deposition arranged by lengthwise and crosswise in a plurality of rows, are stacked.
申请公布号 KR20140102234(A) 申请公布日期 2014.08.21
申请号 KR20147016827 申请日期 2013.01.11
申请人 DAI NIPPON PRINTING CO., LTD. 发明人 HIROBE YOSHINORI;MATSUMOTO YUTAKA;USHIKUSA MASATO;TAKEDA TOSHIHIKO;NISHIMURA HIROYUKI;OBATA KATSUNARI;TAKEKOSHI TAKASHI
分类号 H01L51/56;C23C14/04;G03F7/20;H01L21/027 主分类号 H01L51/56
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