发明名称 |
METAL MASK HAVING A RESIN PLATE, VAPOR DEPOSITION MASK, METHOD FOR PRODUCING VAPOR DEPOSITION MASK DEVICE, AND METHOD FOR PRODUCING ORGANIC SEMICONDUCTOR ELEMENT |
摘要 |
A method for producing a vapor deposition mask capable of satisfying both enhancement in definition and reduction in weight even when a size is increased, a method for producing a vapor deposition mask device capable of aligning the vapor deposition mask to a frame with high precision, and a method for producing an organic semiconductor element capable of producing an organic semiconductor element with high definition are provided. A metal mask provided with a slit, and a resin mask that is positioned on a front surface of the metal mask and has openings corresponding to a pattern to be produced by vapor deposition arranged by lengthwise and crosswise in a plurality of rows, are stacked. |
申请公布号 |
KR20140102234(A) |
申请公布日期 |
2014.08.21 |
申请号 |
KR20147016827 |
申请日期 |
2013.01.11 |
申请人 |
DAI NIPPON PRINTING CO., LTD. |
发明人 |
HIROBE YOSHINORI;MATSUMOTO YUTAKA;USHIKUSA MASATO;TAKEDA TOSHIHIKO;NISHIMURA HIROYUKI;OBATA KATSUNARI;TAKEKOSHI TAKASHI |
分类号 |
H01L51/56;C23C14/04;G03F7/20;H01L21/027 |
主分类号 |
H01L51/56 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|