| 发明名称 |
GAS SENSOR AND MANUFACTURING METHOD THEREOF |
| 摘要 |
Provided is a gas sensor including a substrate, a sensing electrode extended in a first direction on the substrate, and a plurality of heaters disposed in a second direction crossing the first direction on the substrate. The plurality of heaters is separated at both sides of the sensing electrode. The plurality of heaters includes graphene. |
| 申请公布号 |
US2014231933(A1) |
申请公布日期 |
2014.08.21 |
| 申请号 |
US201414163577 |
申请日期 |
2014.01.24 |
| 申请人 |
Electronics and Telecommunications Research Institute |
发明人 |
YU Young-Jun;CHOI Hongkyw;CHOI Jin Sik;CHUNG Kwang Hyo;KIM Jin Tae;YOUN Doo Hyeb;CHOI Choon Gi |
| 分类号 |
G01N27/414;H01L29/66 |
主分类号 |
G01N27/414 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A gas sensor comprising:
a substrate; a sensing electrode extended in a first direction on the substrate; and a plurality of heaters disposed in a second direction crossing the first direction on the substrate, the plurality of heaters being separated at both sides of the sensing electrode, wherein the plurality of heaters comprise graphene. |
| 地址 |
Daejeon KR |
