发明名称 INLET AND REACTING SYSTEM HAVING THE SAME
摘要 An inlet and a reacting system having the same are disclosed. The inlet includes a body provided therein with a transport duct allowing a fluid to flow therethrough, at least one first nozzle connected to one region of a lateral surface of the body and adapted to spray a cleaning solution into the transport duct, and a blocking sheet disposed in the transport duct to be spaced apart from an inner wall of the transport duct, wherein the cleaning solution sprayed from the first nozzle is blocked from being introduced into one region of the transport duct positioned inside the blocking sheet.
申请公布号 WO2014126318(A1) 申请公布日期 2014.08.21
申请号 WO2013KR08395 申请日期 2013.09.17
申请人 LG SILTRON INCORPORATED 发明人 CHO, MAN KEE;SON, SU BIN;RYU, DEUK CHEON
分类号 H01L21/02 主分类号 H01L21/02
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