METHOD AND DEVICE FOR ADJUSTING OPTICAL SYSTEM

摘要

PROBLEM TO BE SOLVED: To shorten adjustment time, and to improve adjustment accuracy.SOLUTION: A first shift amount is obtained as a shift amount of a first output pair obtained by defining two incident heights of three or more incident heights of an optical system 3 as a first incident height pair and receiving each of a pair of light beams incident from the first incident height pair with an image surface of the optical system 3. A second shift amount is obtained as a shift amount of a second output pair obtained by receiving each of the pair of light beams incident from a second incident height pair different from the first incident height pair from among the three or more incident heights of the optical system 3 with the image surface of the optical system 3. A position of the optical system 3 is adjusted on the basis of the first and second shift amounts.