发明名称 CAPACITANCE SENSOR
摘要 PROBLEM TO BE SOLVED: To provide a capacitance sensor which achieves the reduction in start time.SOLUTION: In a vibration mass body 11, a first wing part 31 is lighter than a second wing part 32, because the first wing part 31 is formed into the approximately same shape as the second wing part 32 and also first through holes 34 are formed on the first wing part 31. The first through holes 34 have hole diameters of making first capacitance C1 between the first wing part 31 and a first fixed electrode 25 and second capacitance C2 between the second wing part 32 and a second fixed electrode 26 become same.
申请公布号 JP2014149234(A) 申请公布日期 2014.08.21
申请号 JP20130018372 申请日期 2013.02.01
申请人 YAMAHA CORP 发明人 TSUJI NOBUAKI;ONO HIDEKAZU
分类号 G01P15/125;B81B3/00;H01L29/84 主分类号 G01P15/125
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