发明名称 METHOD FOR PRODUCING METAL FILTERS
摘要 A method for producing a metal filter comprising a lamination step of laminating a photosensitive resin composition on a copper substrate to form a photosensitive resin composition layer, an exposure step of irradiating a predetermined portion of the photosensitive resin composition layer with an active light and light-curing the exposed portion to form a cured material of the photosensitive resin composition, a development step of removing a portion other than the cured material of the photosensitive resin composition of the photosensitive resin composition layer by development to form a resist pattern composed of the cured material of the photosensitive resin composition on the copper substrate, a plating step of metal plating the resist-patterned copper substrate to form a plated layer, a dissolution step of removing the copper substrate with chemical dissolution to obtain a structure composed of the plated layer and the cured material of the photosensitive resin composition, and a stripping step of removing the cured material of the photosensitive resin composition from the structure to obtain the plated layer, wherein the plated layer is the metal filter is useful because it is possible to produce a metal filter in which there are not damages such as wrinkles, folds, scars, and curls and deformation of fine through-holes.
申请公布号 EP2767618(A1) 申请公布日期 2014.08.20
申请号 EP20120839364 申请日期 2012.10.09
申请人 HITACHI CHEMICAL COMPANY, LTD. 发明人 SUZUKI Takahiro;KANBARA Hisashige;KIKUHARA Yoshihito;SUZUKI Kyosuke
分类号 C25D1/08;C25D1/00;C25D1/20;C25D3/12 主分类号 C25D1/08
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