| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a production method of a ferroelectric material layer the electrical characteristics of which can be enhanced furthermore. <P>SOLUTION: The production method of a ferroelectric material layer includes a ferroelectric material precursor layer formation step for forming the precursor layer of a ferroelectric material by coating a substrate with a sol-gel solution, a drying step for drying the precursor layer at a first temperature in the range of 120°C-250°C, a type push step for performing type push processing of the precursor layer while heating to a second temperature higher than the first temperature and in the range of 150°C-300°C, and a ferroelectric material layer formation step for forming the ferroelectric material layer from the precursor layer. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
