Processing system

摘要

A processing system for plate-like objects is provided, with an exposure device and an object carrier with an object carrier surface for receiving the object. The exposure device and the carrier are movable relative to one another, such that the exact position of the object relative to the carrier is determinable. An edge detection device is provided which comprises at least one edge illumination unit having an illumination area, within which an object edge located in the respective object edge area has light directed onto it from the side of the carrier. At least one edge image detection unit is provided on a side of the object located opposite the carrier, the edge image detection unit imaging an edge section of the object edges located in the illumination area as an edge image, such that the respective edge image is detectable in its exact position relative to the carrier.

主权项

1. Processing system for plate-like objects, in particular an exposure system for plate-like objects, comprising:
an exposure device, and an object carrier with an object carrier surface for receiving an object, the exposure device and the object carrier being movable relative to one another for the purpose of exposing the object, an edge detection device for detecting a position of the object on the object carrier, said edge detection device comprising at least one edge illumination unit arranged in the object carrier beneath the object carrier surface, the edge illumination unit having an illumination area in at least one section of a respective object edge area, and within said illumination area an object edge located in the respective object edge area has areally radiated light directed onto it from a side of the object carrier, at least one edge image detection unit provided at a distance from the object carrier surface on a side of the object located opposite the object carrier, said at least one edge image detection unit comprising an optical device imaging an edge section of the object edges located in the illumination area onto an image surface as a respective edge image, the optical device of the at least one edge image detection unit having a detection area with a smaller surface extension than the respective illumination area, the detection area and the illumination areas being movable relative to one another, and the respective edge image being detectable in its exact position relative to the object carrier with the at least one edge image detection unit.