| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a deposition device capable of reducing energy required for operation, and an opening/closing mechanism for a vacuum chamber.SOLUTION: When moving a valve element 9 from a second position P2 to a third position P3, a first cylinder 22 is operated and when pressing a sealing member 11 via the valve element 9 by moving the valve element 9 from the third position P3 to a first position P1, a second cylinder 23 is operated. The first cylinder 22 requires a long stroke since a function for moving the valve element 9 is included but does not require a large cylinder diameter since a function for pressing the sealing member 11 is not included. On the other hand, the second cylinder 23 requires a large cylinder diameter since a function for pressing the sealing member 11 is included but does not require a long stroke since a function for moving the valve element 9 is not included. Therefore, it is not necessary to move the valve element 9 with a force similar to the force when pressing the sealing member 11.</p> |
