ANGULAR VELOCITY SENSOR

摘要

Provided herein is a vibration-type angular velocity sensor capable of improving detection precision of angular velocities around the Z axis and preventing detection precision of angular velocities around the X and Y axes from deteriorating. A weight 3 is columnar or conic. The outline of an outer peripheral portion of a diaphragm 1 has such shape that a straight portion ST is formed at each of four corner portions of a square. Four vibration exciting electrodes 11 are respectively located in four regions partitioned by a first imaginary line L1 and a second imaginary line L2. Four angular velocity sensing electrodes 13 are respectively located in four regions partitioned by a first imaginary diagonal line CL1 and a second imaginary diagonal line Cl2.

主权项

1. An angular velocity sensor comprising:
a flat plate-like diaphragm including a central portion and an outer peripheral portion; a weight disposed at the central portion of the diaphragm; a support portion configured to support the outer peripheral portion of the diaphragm; a vibration exciting portion operable to excite vibration having a motion component oriented in a predetermined axis of vibration with respect to the weight; and a displacement detecting portion operable to detect displacement of the weight caused based on the Coriolis force in a direction of axis of displacement, wherein: defining a XYZ three-dimensional orthogonal coordinate system such that an origin is located at a center position of the diaphragm and a surface of the diaphragm is included in an XY plane, one of the X and Z axes is the axis of vibration and the other is the axis of displacement, and an angular velocity around the Y axis is detected based on a detection value detected by the displacement detecting portion; the weight is columnar or conic in shape; and the diaphragm has such outline shape that an outline shape of the outer peripheral portion has a straight portion or a curved portion located at each of four corner portions of a quadrangle.