| 摘要 |
<p>An electronic fuse structure including an Mx level (202) comprising an Mx metal (208), and an Mx+1 level (214) above the Mx level, the Mx+1 level including an Mx+1 metal (238) and a via (242) electrically connecting the Mx metal to the Mx+1 metal in a vertical orientation, where the Mx+1 metal comprises a thick portion and a thin portion, and where the Mx metal, the Mx+1 metal, and the via are substantially filled with a conductive material.</p> |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BAO, JUNJING;BONILLA, GRISELDA;CHOI, SAMUEL, S.;FILIPPI, RONALD, G.;LI, WAI-KIN;KALTALIOGU, ERDEM;LUSTIG, NAFTALI, E.;SIMON, ANDREW, H.;WANG, PING-CHUAN;ZHANG, LIJUAN |
