| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an illumination optical device which can adjust the pupil intensity distribution at each point on an irradiated surface to a required distribution, respectively.SOLUTION: An illumination optical device illuminating the irradiated surface with light from a light source includes an optical integrator having a plurality of wavefront splitting elements arranged parallelly on the first surface crossing the optical path of the illumination optical device, and a variable member for changing the direction of light incident to the first surface depending on the position in the first surface. The wavefront splitting element of the optical integrator is imparted with a required aberration so that the illumination distribution, formed on the irradiated surface by the light passed through the wavefront splitting element, changes depending on the change in the direction of the incident light.</p> |
