DIFFUSION-AGENT COMPOSITION, METHOD FOR FORMING IMPURITY-DIFFUSION LAYER, AND SOLAR CELL

摘要

A diffusion-agent composition including a borate ester (A); a polyhydric alcohol (B) represented by general formula (1); and an alkoxysilane compound (C). In general formula (1), k represents an integer from 0 to 3, m represents an integer of 1 or more, and R2 and R3 each independently represent a hydrogen atom, a hydroxyl group, a C1-5 alkyl group, or a C1-5 hydroxyalkyl group. When there are a plurality of R2s and R3s, the plurality of R2s and R3s may be the same as or different from one another. When k is 2 or more, the plurality of R2s and R3s always include at least one or more hydroxyl groups or C1-5 hydroxyalkyl groups having 1 to 5 carbon atoms. R4 and R5 each independently represent a hydrogen atom or a C1-3 alkyl group.;

主权项

1. A diffusing agent composition used to form an impurity-diffusing agent layer on a semiconductor substrate, comprising:
a borate ester (A); a polyhydric alcohol (B) expressed by the following general formula (1); and an alkoxysilane compound (C).[In the general formula (1), k represents an integer of 0 to 3, m represents an integer of 1 or more, and R2 and R3 each individually represent a hydrogen atom, a hydroxyl group, an alkyl group having 1 to 5 carbon atoms, or a hydroxyalkyl group having 1 to 5 carbon atoms. When there are a plurality of R2s and R3s, the plurality of R2s and R3s may be the same or different from one another. When k is 2 or more, the plurality of R2s and R3s always contain one or more hydroxyl group or hydroxyalkyl group having 1 to 5 carbon atoms. R4 and R5 each individually represent a hydrogen atom or an alkyl group having 1 to 3 carbon atoms.]