AUTOMATED ALGORITHM FOR TUNING OF FEEDFORWARD CONTROL PARAMETERS IN PLASMA PROCESSING SYSTEM

摘要

Methods and systems for adapting and/or tuning feedforward control parameters in a plasma processing chamber. In embodiments, a dependent process parameter, such as a chamber component temperature, is controlled with a feedforward control algorithm based on one or more independent process parameters, such as RF power. A control algorithm may calculate steady-state deviation of the dependent parameter from a process recipe setpoint, estimate an amount by which an existing control gain coefficient is to be changed to better achieve the setpoint, associate the new control gain coefficient with the particular recipe operation, and store the new control gain coefficient for subsequent execution of the recipe operation. In embodiments, the amount by which a gain coefficient is to be changed is based on a model function derived from a lookup table associating gain coefficients with setpoints of the dependent process parameter and values of the independent process parameter.

主权项

1. A computer-implemented method for adaptively controlling a process parameter for a plasma processing chamber, the method comprising:
controlling a dependent process parameter value, at least in part, with a feedforward control signal; determining the process parameter to be in a steady state condition with a value that deviates from a setpoint of the dependent process parameter value; and modifying a gain coefficient of the feedforward control signal based on a model function relating a change in the gain coefficient with a change in the dependent process parameter value.