| 摘要 |
When a cleaning liquid is supplied to a casing 1 by a liquid supply flow path 3, an air inside the casing 1 is discharged to an outside air by an air flow path 5. Consequently, a load that is applied when the casing 1 is filled with the cleaning liquid can be reduced, and also a time to have the casing 1 filled with the cleaning liquid can be a short time. In addition, when the cleaning liquid is discharged from the casing 1, a load that is applied to the discharge of the cleaning liquid can be reduced because the air flows into the casing 1 by the air flow path 5. |
