| 摘要 |
PROBLEM TO BE SOLVED: To obtain an observation image having higher image quality, when an optical element capable of controlling the amplitude and phase of light independently is used for a scanning microscope. SOLUTION: A dispersion filter 62 can control the amplitude and phase of incident infrared light independently, in the dispersion filter 62 however, an effectively operable period and an effectively non-operable period are generated. At this time, an adjusting part 22 controls the operations of three dispersion filters 62 so as to effectively operate one of three dispersion filters 62, at each time. An acousto-optical element 61 makes the infrared light incident on the dispersion filter 62 effectively operated of three dispersion filters 62. A synthesizing element 63 synthesizes the infrared light so that a sample is irradiated with the infrared light from the dispersion filters 62 after passing through one and the same optical path. Thus, the sample can be irradiated with the infrared light whose amplitude and phase are always properly adjusted and the observation image having higher image quality can be obtained. The invention can be applied to the scanning microscope. COPYRIGHT: (C)2011,JPO&INPIT |
