Optical angle-measuring device with combined radial-circular grating

摘要

In an optical angle-measuring device for ascertaining the relative movement between at least one scanning grating and a graduated disk having at least one measuring graduation, the scanning grating is in the form of a linear scanning grating, and the graduated disk includes a first and a second combined radial-circular grating as measuring graduation, and has a mirror. An incident beam of rays is initially split at the scanning grating into two partial beams of rays that then propagate in the direction of the first combined radial-circular grating and are diffracted there, then propagate in the direction of the mirror and are reflected there in the direction of the second combined radial-circular grating, subsequently propagate in the direction of the second combined radial-circular grating and are diffracted there, and then propagate in the direction of the scanning grating, where a superposition of the partial beams of rays results.

主权项

1. An optical angle-measurement device adapted to ascertain a relative movement between the scanning grating and the graduated disk device, comprising:
at least one scanning grating arranged as a linear scanning grating; a graduated disk including a first and a second combined radial-circular grating as a measurement graduation and a mirror; and wherein the scanning grating is adapted to initially split an incident beam of rays into two partial beams of rays that propagate in a direction of the first combined radial-circular grating; wherein the first combined radial circular grating is adapted to diffract the partial beams of rays so that the diffracted partial beams of rays propagate in a direction of the mirror; wherein the minor is adapted to reflect the partial beams of rays in a direction of the second combined radial-circular grating so that the partial beams of rays propagate in a direction of the second combined radial-circular grating; wherein the second combined radial-circular grating is adapted to diffract the partial beams of rays so that diffracted partial beams of rays propagate in a direction of the scanning grating; and wherein the scanning grating is adapted to superpose the partial beams of rays.