Inspection method and inspection apparatus

摘要

This application relates to an inspection apparatus including: a stage which holds a specimen; an illumination optical system which illuminates a surface of the specimen held on the stage, with illumination light; a dark-field optical system which detects scattered light generated by the illumination light with which the specimen is illuminated; a photoelectric converter which converts the scattered light detected by the dark-field optical system, into an electric signal; an A/D converter which converts the electric signal obtained by conversion by the photoelectric converter, into a digital signal; a judgement unit which determines the dimension of a foreign substance on the surface of the specimen on the basis of a magnitude of the scattered light from the foreign substance; and a signal processor which determines an inspection condition by use of information on the scattered light from the specimen surface.

主权项

1. An inspection apparatus comprising:
an illumination system configured to supply a sample with a light; a detection system configured to detect the light from the sample; a processing system configured to acquire a predetermined frequency component which is an electrical signal from the detection system, wherein the predetermined frequency component is lower than a frequency component indicating an anomaly on the sample.