| 发明名称 | Silicon containing coating compositions and methods of use | ||
| 摘要 | Coating compositions include a polymer including:; wherein R1 is a silicon containing moiety, R2 is an acid stable lactone functionality, and R3 is an acid labile lactone functionality; X1, X2, X3 are independently H or CH3; and m and o are non-zero positive integers and n is zero or a positive integer representing the number of repeat units; a photoacid generator; and a solvent. Also disclosed are methods for forming a pattern in the coating composition containing the same. | ||
| 申请公布号 | US8802347(B2) | 申请公布日期 | 2014.08.12 |
| 申请号 | US200912613804 | 申请日期 | 2009.11.06 |
| 申请人 | International Business Machines Corporation | 发明人 | Allen Robert D.;Brock Phillip J.;Chen Kuang-Jung;Friz Alexander;Huang Wu-Song;Sooriyakumaran Ratnam;Swanson Sally A.;Truong Hoa D. |
| 分类号 | G03F7/039;G03F7/11;G03F7/20;G03F7/30;G03F7/38 | 主分类号 | G03F7/039 |
| 代理机构 | Cantor Colburn LLP | 代理人 | Cantor Colburn LLP |
| 主权项 | 1. A coating composition, comprising: a polymer comprising wherein R1 is a silicon containing moiety, R2 is an acid stable lactone functionality, and R3 is an acid labile lactone functionality; X1, X2, X3 are independently H or CH3; and m and o are non-zero positive integers and n is a positive integer representing the number of repeat units, wherein the silicon containing moiety is derived from a monomer selected from the group consisting of: a photoacid generator; and a solvent. | ||
| 地址 | Armonk NY US | ||