Sensor for determination of the incidence angle of radiation and method for measurement the incidence angle using such a sensor

摘要

A sensor and a corresponding method for the determination of the incidence angle of a radiation source are provided. The sensor has a diode assembly of avalanche photodiodes in a semiconductor layer and an application specific integrated circuit, a distance layer, an aperture structure located on the distance layer, and contacts for electrically connecting the sensor. The layers and structures are positioned directly on top of each other and match in their shape, size or thickness.

主权项

1. Sensor for determination of an incidence angle of a radiation source, comprising:
in a semiconductor layer, a diode assembly of avalanche photodiodes comprising a position sensitive detector, and an application specific integrated circuit for generation of analogue output signals that can be evaluated, a transparent distance layer for the adjustment of a distance, an aperture structure on the distance layer and comprising a defined opening in a non-transparent layer, and contact means for electrically connecting the sensor,wherein the diode assembly comprises n pairs of avalanche photodiodes with n=1, 2, 3 etc. arranged in such a way that the avalanche photodiodes are positioned axially symmetrically in relation to both axes x and y for the determination of the position of the incident radiation, and so that the opening of the aperture structure depending on the incidence angle of the radiation can be partly imaged on the avalanche photodiodes of this diode assembly respectively.