Linearly deployed actuators

摘要

A method for making an actuator includes forming a substantially planar actuator device of an electrically conductive material, the device incorporating an outer frame, a fixed frame attached to the outer frame, a moveable frame disposed parallel to the fixed frame, a motion control flexure coupling the moveable frame to the outer frame for coplanar, rectilinear movement relative to the outer frame and the fixed frame, and an actuator incorporating a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame, moving the moveable frame to a deployed position that is coplanar with, parallel to and spaced at a selected distance apart from the fixed frame and fixing the moveable frame at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame.

主权项

1. An actuator, comprising a substantially planar actuator device, the actuator device comprising:
an outer frame; a fixed frame attached to the outer frame; a moveable frame disposed parallel to the fixed frame; a motion control flexure coupling the moveable frame to the outer frame for coplanar, rectilinear movement of the moveable frame relative to the outer frame and the fixed frame; an element coupled to the moveable frame by a flexure for coplanar, rectilinear movement relative to the fixed and outer frames and for coplanar, rotational movement about a central axis of the element; and, a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame, wherein the moveable frame is mechanically and/or adhesively fixed in a deployed position that is coplanar with, parallel to and spaced apart from the fixed frame at a selected distance that is greater than the length of the teeth and less than twice the length of the teeth for substantially perpendicular movement relative thereto.