Laser diode and method of manufacturing the same

摘要

A laser diode capable of independently driving each ridge section, and inhibiting rotation of a polarization angle resulting from a stress applied to the ridge section without lowering reliability and a method of manufacturing the same are provided. A laser diode includes: three or more strip-like ridge sections in parallel with each other with a strip-like trench in between, including at least a lower cladding layer, an active layer, and an upper cladding layer in this order; an upper electrode on a top face of each ridge section, being electrically connected to the upper cladding layer; a wiring layer electrically connected to the upper electrode, in the air at least over the trench; and a pad electrode in a region different from regions of both the ridge section and the trench, being electrically connected to the upper electrode through the wiring layer.

主权项

1. A method of manufacturing a laser diode comprising:
a first step of forming on a semiconductor substrate, three or more strip-like ridge sections in parallel with each other with a strip-like trench in between, the three or more strip-like ridge sections including at least a lower cladding layer, an active layer, and an upper cladding layer in this order from the semiconductor substrate side; a second step of forming a sacrificial layer that fills in at least an inside of the trench and that does not cover a whole top face of the ridge section, subsequently forming a wiring layer electrically connected to the upper cladding layer on the sacrificial layer according to needs, and forming a pad electrode electrically connected to the upper electrode through the wiring layer, in a region different from regions of both the ridge section and the trench; and a third step of removing the sacrificial layer.