METHOD FOR MANUFACTURING MASK USING LASER BEAM AND APPARATUS FOR MANUFACTUING MASK

摘要

An apparatus for manufacturing a mask includes a laser irradiation unit, a stage, a frame, and a heat radiant sheet. The laser irradiation unit divides a laser beam into a plurality of sub-laser beams and emits the same onto a shadow mask. The shadow mask is fixated onto the stage. The frame is arranged top of the stage to support the shadow mask. The heat radiant sheet comes in contact with the shadow mask to absorb the heat generated from the shadow mask and emits the same to the outside. According to the apparatus for manufacturing a mask, by resolving a problem in which the shadow mask is overheated, the sub-laser beams having far stronger power can be utilized to reduce a pattern forming time of the shadow mask.