发明名称 |
SUBSTRATE TREATING APPARATUS |
摘要 |
The present invention relates to a substrate processing apparatus which includes: a substrate floating unit which includes a floating stage with a plurality of holes on the upper side thereof to float a substrate; and a gripping member which is provided on the substrate floating unit and transfers the substrate by gripping the substrate. The floating stage provides at least two transfer spaces along the transfer direction of the substrate. The gripping member is located on each transfer space. |
申请公布号 |
KR20140098499(A) |
申请公布日期 |
2014.08.08 |
申请号 |
KR20130011249 |
申请日期 |
2013.01.31 |
申请人 |
SEMES CO., LTD. |
发明人 |
KOO, KYO WOOG;KIM, BYUNG JIN;KIM, TAE HO |
分类号 |
G02F1/1337;G02F1/13 |
主分类号 |
G02F1/1337 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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