| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a defect inspection device that enables presence/absence of a defect in a specific area of an inspected body to be efficiently inspected with high accuracy.SOLUTION: In a defect inspection device (1), an imaging section (13) receives reflection light reflected from a surface of an inspected body (20) irradiated with diffusion light by a light irradiation section (12), and generates an inspection image (30) on the basis of light intensity of the received reflection light. The imaging section (13) is arranged to face the surface of the inspected body (20) so that a light reception axis (L2) is displaced from an optical axis (L3) of the reflection light. An image process device (14) extracts a reference pixel from each pixel constituting the inspection image (30), extracts a pixel for setting an inspection area on the basis of the reference pixel, sets the inspection area in the inspection image on the basis of the pixel for setting the inspection area, and detects a defective pixel from each pixel constituting the inspection area.</p> |
