Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium

摘要

Provided is a substrate processing apparatus capable of efficiently resuming processing of unprocessed substrates after an error occurs during processing of substrates. In the substrate processing apparatus that executes a recipe defining an order of processing substrates and manages process status of the substrates, the process status are changed to a processing state so as to execute the recipe, are changed to a paused state when unprocessed substrates are present among the substrates to be processed according to the recipe, due to an error occurring during the execution of the recipe, and are changed from the paused state to the processing state to resume the execution of the recipe so as to process the unprocessed substrates when the error is canceled and a operation is performed to resume the execution of the recipe.

主权项

1. A substrate processing apparatus comprising:
a control unit configured to control an execution of a recipe defining an order of processing a substrate and manage a process status of the substrate; and a manipulation unit configured to receive a resume command instructing to resume a stopped operation, wherein the control unit changes the process status to a processing state so as to control an execution of the recipe, and changes the process status to a pause state in case that an unprocessed substrate is present among substrates to be processed according to the recipe, when the execution of the recipe is stopped due to an error occurring during the execution of the recipe, wherein the manipulation unit transmits the resume command to the control unit when the resume command is received after the error is canceled and an operation for resuming the execution of the recipe is performed, and wherein the control unit changes the process status from the pause state to the processing state, and resumes the execution of the recipe so as to process the unprocessed substrate when receiving the resume command.