Microvalve with Integrated Flow Sensing Capability

摘要

A system for controlling the flow of a fluid from a source to a load includes a source. An on/off type of control valve communicates with the source. A micro-electric mechanical system communicates with the on/off type of control valve. A consuming device communicates with the micro-electric mechanical system. An electronic controller that communicates with the consuming device and the source. The electronic controller measures a change in a parameter of the micro-electric mechanical system that results from the flow of fluid through the micro-electric mechanical system to sense a flow of fluid through a micro-electric mechanical system.

主权项

1. A method of sensing a flow of fluid through a micro-electric mechanical system comprising the steps of:
(a) providing a micro-electric mechanical system; (b) providing a flow of fluid through the micro-electric mechanical system; and (c) measuring a change in a parameter of the micro-electric mechanical system that results from the flow of fluid through the micro-electric mechanical system to sense a flow of fluid through a micro-electric mechanical system.